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      1. 產品中心 > 晶體硅電池線工藝設備 > 管式等離子體淀積爐

        管式等離子體淀積爐

        設備名稱 Equipment Name

        管式等離子體淀積爐  Horizontal PECVD

        設備型號 Equipment Model

        PD-520

        設備用途 Equipment Application

        主要用于晶體硅太陽能電池制造中電池片的減反射膜生長,也可用于在電池片的背面沉積鈍化膜。
        Mainly used for generates highest quality anti-refiective coatings in the production of crystal silicon solar cells, and for deposition of passivation film on the rear side of solar cells.

        工藝流程 Process Flow

        石墨舟及硅片準備→管內充氮氣→進舟→抽真空、壓力測試→氨氣預清理和檢查→管路抽真空、測漏、恒溫→預鍍膜→鍍膜→抽真空、壓力測試→清管路、充氮氣→退舟
        Graphite boat & wafers ready→Nitrogen inlet→Graphite boat load in→Vacuumize, pressure test→Ammonia pre-clean and check→Vacuumize the tube,leak-checking , constant temperature→Pre-coating→Coating→Vacuumize,pressure test→Tube cleaning and Nitrogen inlet→Graphite boat unload


        技術特點  Features

        1、兼容氮氧化硅PERC技術。
        Compatible with SiOxNy PERC process.

        2、雙水冷密封技術。
        Double cooling water flanges sealing technology.

        3、專利內加熱技術。
        Patented internal heating technology.

        4、高速平穩整體模組推舟機構。
        High-speed integral module boat pushing mechanism.

        5、懸浮承載舟技術。
        Graphite boat contact-free with quartz tube.

        6、自主知識產權MES軟件。
        MES software with independent intellectual property right.

        7、自主開發中央計算機集中控制系統。
        Independently developed CCC system.

        8、快速鍍膜技術。
        Fast coating technology.

        9、全面的防超溫、斷偶、撞舟等安全報警保護功能。

        Alarm protection for over-heating, thermocouple -break and boat collision. 


        設備參數  Parameters

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